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Wafer Laser Marking | WLM
Wafer Laser Marking | WLM
Application
Si wafer, Bonded wafer, SiC/Saphire
wafer laser marking
Product Features
  • High precision laser processing&depth control

  • Auto sample transfer, high precision positioning

  • Auto detection of marking effects

  • Multi-dust processing,Max. control of particle size

ItemWLM1120 / WLM2120 / WLM2130
Laser wavelength355/532nm
Laser power10W/15W@355nm, 15W/30W@532nm
Wafer Positioning Accuracy±0.1mm
Marking repeatability±20μm
Single point diameter45-80μm
roundness>95%
Wafer size6 inch, 8 inch, 12 inch
FontStandard SIMI font