First domestic green laser machine for mass pruduction
High reliability and stability
Independly developped Optical system, LIET technology with IP
Green/UV laser two wavelengths are optional
| Item | LA2515UV | LA2540/2550S |
| Wafer Size | 6 inch,8 inch | |
| Spot size | X:100~500μm | Y:100~500μm |
| Max. laser energy density | Green:10J/cm2 | UV:6J/cm2 |
| Specific contact resistance | ~10-5Ω·cm2 | |
| Oxygen control | ≤10ppm | |
