First domestic green laser machine for mass production
High reliability and stability
Independently developed optical system with LIET technology
Green and UV laser wavelength options
| Wafer Size | 6-inch,8-inch | |
| Spot Size | X:100~500μm | Y:100~500μm |
| Max Laser Energy Density | Green:10J/cm2 | UV:6J/cm2 |
| Specific Contact Resistance | ~10-5Ω·cm2 | |
| Oxygen Control | ≤10ppm | |
