High reliability and stability
Independly developped Optical system
Excellent thermal budget control
50μm ultra-thin TaiKo wafer handling capability
| Item | LA2540S | LA2550S | LA2540D | LA2550D |
| Wafer size | 6 inch, 8 inch, 12 inch | |||
| Laser power | 60W*2 | 90W*2 | 60W*2+300W | 90W*2+300W |
| Laser energy density | ≥5J/cm2×2 | |||
| Activation efficiency | ≥95%@B+ | ≥90%@P+ | ||
| RS non-uniformity | WIW：≤1%@3sigma | WTW：≤1%@3sigma | ||
