The first in China, 8 inch mass production equipment
Precise energy density control
UV laser with low penetration depth
1D top hat beam with large lengh/width ratio
Low dopant diffusion
Item | LA2518UV |
Wafer Size | 6 inch, 8 inch |
Junction depth | ≤50nm |
Impurity peak diffusion depth | ≤5nm |
RS non-uniformity | <2% (WIW/WTW) |