The world's first, 12 inch mass production facility
Independly developped optical system with LIET technology enables high uniformity
Energy density accuracy down to 5mJ/cm2
nS level pulse width control
| Item | LA2540G |
| Laser wavelength | 527nm |
| Wafer size | 12 inch |
| Energy modulation accuracy | 5mJ/cm2 |
| uniformity of beam top | ≤1% |
| Focal depth range | 5mm |
