The first in China, 8 inch mass production equipment
Precise energy density control
UV laser with low penetration depth
1D top hat beam with large lengh/width ratio
Low dopant diffusion
| Item | LA2518UV |
| Wafer Size | 6 inch, 8 inch |
| Junction depth | ≤50nm |
| Impurity peak diffusion depth | ≤5nm |
| RS non-uniformity | ＜2% (WIW/WTW) |
