Automatic recognition of front-end process marks. Direct access to Mapping files for laser marking
Line scan CCD detection and identification system
Material number processing information storage and recording function
| Technical specifications | |
| Laser wavelength | 532nm |
| CCD positioning accuracy | ±5μm |
| Output power | 0-10W adjustable |
| Laser Marking Depth | 0.05-0.4mm adjustable |
| Line width | 30μm |
| Repeatability | ±3μm |
| CCD positioning | 5 megapixels |
| CCD video detection | 20 megapixels |